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Supercritical CO2 cleaning machine

supercritical CO2 cleaning machine

Supercritical CO2 cleaning machine

Supercritical CO2 cleaning machine is based on traditional wet cleaning technology, the cleaning liquid is replaced with liquid CO2, and then superfluid drying is performed.

Supercritical CO2 cleaning machine/system inherits the advantages of traditional wet cleaning technology, eliminates the Achilles heel of the final drying of the wet method

Application of supercritical CO2 cleaning machine

Supercritical CO2 cleaning machine/equipment can solve many problems in the cleaning process of the microelectronics industry.

For example, cleaning of high aspect ratio structures after etching and ashing, cleaning of porous low-dielectric materials after etching and ashing, drying after cleaning, cleaning of metal particles of semiconductor devices, etc.

About supercritical CO2 cleaning

Supercritical CO2 is a cleaning agent that can replace VOC and CFC and has certain advantages.

Supercritical CO2 cleaning integrated circuit board

Nature of supercritical CO2 fluid

CO2 fluid organic matter has the ability to dissolve, stable performance to various cleaning materials during the cleaning process, low viscosity and high diffusivity, low surface tension, good wettability, easy to penetrate into the interior of the material to be cleaned, and can effectively remove the dirt after cleaning. No need to dry, no residue.

CO2 fluid cleaning has reduction in energy and solvent consumption, simplification of solvent separation and post-treatment procedures, operating costs are significantly reduced.

Advantages and development

Supercritical CO2 cleaning has advantages in technology, economy and environmental protection, such as high removal efficiency of pollutants, low solvent and energy consumption, no volatilization of organic solvents in the process, no toxic and flammable solvents, no need for drying and Solvent post-treatment process.
The simple and low-cost recycling of CO2 and no statistical waste and waste water have fully demonstrated its broad development prospects.

Supercritical CO2 fluid characteristics

The viscosity is extremely small, which is equivalent to the viscosity of gas, with good transferability and fast moving ability;
SCF has a large diffusive power, which is more than 100 times the liquid diffusive power;
Surface tension is very small, and it can enter the slits and micro grooves for cleaning;
Supercritical CO2 fluid has a strong ability to dissolve organic dirt and some inorganic dirt on the surface of the material.


Supercritical CO2 cleaning machine Cost and CO2 cleaning equipment price

Supercritical CO2 ultrasonic cleaning equipment
supercritical CO2 cleaning machine with magnetic stirring

Our supercritical CO2 cleaning machine price is lower than our peers’, and our CO2 cleaning equipment is high quality, we have our own manufacturing factory, all products are factory price, there is absolutely no middleman markup, we accept both small batch scale customer and large industrial batch scale wholesale supercritical CO2 cleaning machines and waterless CO2 cleaning systems for sale online